磁悬浮电镀泵_半导体清洗泵 - 槃实科技（深圳）有限公司

Microelectronics

Industry Applications Industry Applications

Microelectronics

Medical devices

Chemical industry

Biomedicine

Intelligent manufacturing

Overview

With the rapid development of microelectronics technology, the microelectronic components have become smaller in size and more sophisticated. The process for these components (including semiconductor manufacturing, photovoltaics, flat panel displays, etc.) has also become more stringent. Wet processing involves the use of a wide variety of media across multiple steps. For critical process applications, the availability of ultra-clean, safe, and reliable conveying solutions is extremely important.

Process Overview

Delivery of bulk chemicals

The microelectronics industry demands large volumes of diverse chemicals, making contamination-free transfer a top priority. Our ultra-clean pumps are the ideal choice for bulk chemical delivery.

Coating and developing

In photoetching, the photoresist that is uniform in thickness and free of contamination is critical to yield. Our maglev bearingless pump is able to provide premium solutions for the cleanest, most precise, and reliable conveying of photoresist and developer.

Wet etching

Both selectivity and directionality are the key factors in etching. Our pumps can ensure flow control and no pulsation, thus conveying pure etchants precisely and reliably.

Wet cleaning

The maglev bearingless pump can best ensure that media are clean and free of any contamination. It has become an industry standard for ultra-pure cleaning processes.

Electroplating

In electroplating, our maglev bearingless pump can convey electrolyte stably, finally ensuring electroplating uniformity.

Chemical Mechanical Polishing (CMP)

The consistency of slurry is critical to ensuring the uniformity of chemical mechanical polishing (CMP). Featuring wide gap design and low shear force, our maglev bearingless pump can avoid slurry agglomeration effectively and minimize scratches, thereby ensuring high yield.

Applications

Wet Cleaning

High cleanliness is a standard requirement in cleaning process while high-purity cleaning solution must always be the top priority. Our ultra-clean pump is surely a premium choice for satisfying the requirements above.

CMP

Electroplating

In electroplating, the maglev bearingless pump can convey electrolyte stably, thus ensuring electroplating uniformity.

Delivery of bulk chemicals

As the cleanest pump, the maglev bearingless pump basically causes no contamination to bulk chemicals during the transportation process. It is a standard for ultra-pure and safe process.

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